Semiconductor and method of fabricating the same

ABSTRACT

Provided is a semiconductor and method of manufacturing the same, and a method of forming even doping concentration of respective semiconductor device when manufacturing multiple semiconductor devices. When a concentration balance is disrupted due to an increase in doping region size, doping concentration is still controllable in example by using ion injected blocking pattern. Thus, the examples relate to a semiconductor and manufacture device with even doping, and high breakdown voltage obtainable as a result of such doping.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application claims the benefit under 35 USC 119(a) of Korean PatentApplication No. 10-2014-0161750 filed on Nov. 19, 2014 in the KoreanIntellectual Property Office, the entire disclosure of which isincorporated herein by reference for all purposes.

BACKGROUND

1. Field

The following description relates to a semiconductor device and a methodfor manufacturing the semiconductor device. The following descriptionfurther relates to a semiconductor and a method of fabricating the same,wherein the semiconductor is configured so as to obtain an even and highbreakdown voltage.

2. Description of Related Art

In an example of a N-type Lateral Double diffusedMetal-Oxide-Semiconductor (LDMOS), a body region that includes a sourceregion is connected to a ground power and, a breakdown voltage islimited from a high concentration N-type (N+) source region to a bodyregion.

Various approaches have been suggested to address concerns related to alow breakdown voltage of said LDMOS element. For example, approacheshave been suggested such as a deep well that is extended and situatedfrom a drain region to a P-type body region, so as to surround theP-type body region, such that the surrounding source region forms a lowconcentration N-type diffusion region wherein such a region is situatedto surround a high concentration N-type source region. Although it ispossible to improve a breakdown voltage above a certain level to someextent through said methods, a breakdown voltage of over approximately100 V for such an LDMOS has not been obtainable.

Furthermore, a method of fully isolating a P-type body region from asubstrate by forming an N-type high concentration N+ buried layerbetween the substrate and a deep well region and forming a thickepi-layer on a substrate has been suggested. However, such a technologythat uses such an approach to configure a buried layer and thickepi-layer has not only a problem of requiring a high unit cost, but alsomany applications that are not compatible with such an approach of fullyisolating the P-type body region exist.

SUMMARY

This Summary is provided to introduce a selection of concepts in asimplified form that are further described below in the DetailedDescription. This Summary is not intended to identify key features oressential features of the claimed subject matter, nor is it intended tobe used as an aid in determining the scope of the claimed subjectmatter.

Examples overcome the above disadvantages and other disadvantages notdescribed above. Also, the examples are not required to overcome thedisadvantages described above, and an example potentially does notovercome any of the problems described above.

The examples provide a semiconductor and method of fabricating the samewhich can have a higher breakdown voltage than alternatives.

The examples provide a semiconductor and method of fabricating the samewith a higher breakdown voltage than alternatives. The examples alsoprovide the possibility of manufacturing a semiconductor device with alower cost of manufacturing said semiconductor device.

Furthermore, the examples provide a semiconductor and method offabricating the same which improves stability of a breakdown voltage inregards to reduced surface field (RESURF) structure of a semiconductordevice. The RESURF concept gives the best trade-off between thebreakdown voltage and the on-resistance of a device.

According to one general aspect, a semiconductor device includes a firstregion and a second region located on a substrate, a first semiconductordevice located in the first region and having a first deep well regionwith a first doping concentration, a second semiconductor device locatedin the second region and having a second deep well region with a seconddoping concentration that is greater than the first dopingconcentration, a first body region of a first conductivity type having athird doping concentration, adjacent to the first deep well region, anda second body region of a second conductivity type opposite to the firstconductivity type located in the first body region, wherein the firstdeep well region has a non-planar doping profile in a horizontaldirection.

The first deep well region may have an uneven bottom surface.

A total doping concentration of the first deep well region and the firstbody region may be substantially balanced with a total dopingconcentration of the second deep well region.

The first doping concentration may be less than the second dopingconcentration by within one order of magnitude.

The first deep well region may have a non-planar shape of a dopingprofile in a horizontal direction.

The semiconductor device may further include a pinch-off region in thesemiconductor substrate located between the first deep well region andthe first body region.

The first doping concentration may be less than the third dopingconcentration.

The first deep well region may have substantially the same depth as thefirst body region.

In another general aspect, a method for fabricating a semiconductorincludes forming a first region and a second region on a substrate,forming a first semiconductor device located in the first region andhaving a first deep well region of a first doping concentration, forminga second semiconductor device located in the second region and having asecond deep well region of a second doping concentration that is greaterthan the first doping concentration, forming a first body region of afirst conductivity type having a third doping concentration, adjacent tothe first deep well region, and forming a second body region of secondconductivity type opposite to the first conductivity type located in thefirst body region, wherein the first deep well region, the first bodyregion and the second deep well region are formed in the same process,and wherein the first deep well region is formed using a mask patternthat blocks ion injection.

The mask pattern may include stripe patterns.

The first deep well region may have a bottom surface that has awave-shaped pattern.

The wave-shaped pattern may be aligned with a position of the blockingpattern.

The method may further include forming a body region of the secondconductivity type and a source region of the first conductivity type inthe first body region, forming a drain region of the first conductivitytype on the first deep well region, forming a gate insulator film overthe first body region and the first deep well region, and forming a gateelectrode on the gate insulation layer.

In another general aspect, a semiconductor device includes a first deepwell region with a first doping concentration of a first semiconductordevice located in a first region located on a substrate, a second deepwell region with a second doping concentration that is greater than thefirst doping concentration of a second semiconductor device located inthe a second region located on a substrate, a first body region of afirst conductivity type with a third doping concentration, adjacent tothe first deep well region, and a second body region of a secondconductivity type opposite to the first conductivity type located in thefirst body region, wherein the first deep well region has a non-planardoping profile in a horizontal direction.

The first deep well region may have an uneven bottom surface.

A total doping concentration of the first deep well region and the firstbody region may be substantially balanced with a total dopingconcentration of the second deep well region.

The first doping concentration may be less than the second dopingconcentration by within one order of magnitude.

The semiconductor device may further include a pinch-off region in thesemiconductor substrate located between the first deep well region andthe first body region.

The first doping concentration may be less than the third dopingconcentration.

The first deep well region may have substantially the same depth as thefirst body region.

Other features and aspects will be apparent from the following detaileddescription, the drawings, and the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a reference semiconductor structure of semiconductordevice according to an example.

FIG. 2 illustrates an example of an entire semiconductor device appliedwith a semiconductor device according to an example.

FIG. 3 illustrates a semiconductor and method of manufacturing the sameaccording to an example.

FIG. 4 illustrates a semiconductor device which is manufacturedaccording to an example.

FIG. 5 illustrates a concentration profile of A-A′ in the semiconductordevice according to an example.

FIGS. 6A to 6E illustrates an example of a mask pattern which isapplicable to an example.

FIG. 7 illustrates a semiconductor device according to another example.

FIG. 8 illustrates a semiconductor device according to another example.

FIGS. 9A and 9B respectively show an illustrated semiconductor structureand a result of features of such a semiconductor device in the exampleof FIG. 5.

FIG. 10 is a diagram illustrating BV value of a semiconductor structureaccording to an example and semiconductor structure according to analternative example.

FIG. 11 illustrates N-type doping concentration profiles in the deepwell region with and without a stripe pattern.

Throughout the drawings and the detailed description, the same referencenumerals refer to the same elements. The drawings may not be to scale,and the relative size, proportions, and depiction of elements in thedrawings may be exaggerated for clarity, illustration, and convenience.

DETAILED DESCRIPTION

The following detailed description is provided to assist the reader ingaining a comprehensive understanding of the methods, apparatuses,and/or systems described herein. However, various changes,modifications, and equivalents of the methods, apparatuses, and/orsystems described herein will be apparent to one of ordinary skill inthe art. The sequences of operations described herein are merelyexamples, and are not limited to those set forth herein, but may bechanged as will be apparent to one of ordinary skill in the art, withthe exception of operations necessarily occurring in a certain order.Also, descriptions of functions and constructions that are well known toone of ordinary skill in the art may be omitted for increased clarityand conciseness.

The features described herein may be embodied in different forms, andare not to be construed as being limited to the examples describedherein. Rather, the examples described herein have been provided so thatthis disclosure will be thorough and complete, and will convey the fullscope of the disclosure to one of ordinary skill in the art.

Certain examples are now described in greater detail with reference tothe accompanying drawings.

In the following description, the same drawing reference numerals areused for the same elements, even in different drawings. The mattersdefined in the description, such as detailed constructions of terms andelements, are provided to assist in a comprehensive understanding of thepresent examples. Accordingly, it is apparent that it is possible forthe examples to be carried out without those specifically definedmatters. Also, well-known functions or constructions are not describedin detail to avoid obscuring the examples with unnecessary detail.

While the expressions such as “first” or “second” are potentially usedto refer to various elements, the elements are not intended to belimited by the expressions. Such expressions are used only for thepurpose of distinguishing one element from the other when referring tosuch elements.

The expressions presented are used herein only for the purpose ofexplaining specific examples and are not intended to place limits on thepresent examples. An expression in singular form also encompasses pluralmeaning, unless otherwise specified. Throughout the description, theexpression “comprise” or “have” is used only to designate the existenceof a characteristic, number, step, operation, element, component or acombination thereof which is described herein, but not to precludepossibility of existence of one or more of the other characteristics,numbers, steps, operations, elements, components or combinations ofthese or other appropriate additions.

Spatial words, such as below, beneath, lower, above and upper are usedto conveniently recite a correlation between one element or featureswith respect to other elements or features, as illustrated in thedrawings. When spatial terminology is used with a direction asillustrated in the drawing, if the illustrated element is upside down,the element that was recited as below and beneath is also potentiallyconsidered to be above or upper of another element. Thus, examplespresented below include all such instances related to the directions ofbelow and above. An element is also potentially aligned in anotherdirection, and thereby spatial words are interpreted according to thealignment.

Moreover, words such as a first conductive type and a second conductivetype indicate opposite conductive types like P-type or N-type. Anexample that is each recited and illustrated herein includescomplementary examples thereof, in which P-type dopants are replaced byN-type dopants and vice versa. For example, in an example, a firstconductive type is a P-type and a second conductive type is a N-type,but these types are switched in another example.

Before discussing further a semiconductor and method of fabricating thesame, explanation regarding reference semiconductor structure of thepresent invention is presented through a discussion of a detailedillustration in regards to FIG. 1.

FIG. 1 illustrates a reference semiconductor structure regardingsemiconductor device and a mask pattern thereof.

As illustrated in the example of FIG. 1, a semiconductor device with aquasi-isolated P-type body region 40 is suggested in regards to theprocess of developing a technology of manufacturing a semiconductor andmethod of fabricating the same of the present example.

Specifically, the quasi-isolated semiconductor device which isillustrated in the example of FIG. 1, indicates a semiconductorstructure in which an N-type body region 30 is added to electronicallyisolate a P-type body region 40 from a P-type substrate 10.

Thus, a semiconductor device as illustrated in the example of FIG. 1includes a P-type substrate 10; an N-type deep well 20 which is formedon the substrate 10, an N+ drain region 25 formed on the N-type deepwell 20, an N+ source region 45 and a P+ pickup region 47 which isformed on a substrate, a P-type body region 40 formed so as to surroundthe N+ source region 45 and P+ pickup region 47, and an N-type bodyregion 30, such as a second semiconductor region, formed at an identicaldepth with the N-type deep well 20, such as a first semiconductorregion, that surrounds the P-type body region 40, wherein the N-typebody region 30 is in direct contact with the N-type deep well 20.

In order to form said semiconductor structure as illustrated in theexample of FIG. 1, a single open-type mask pattern, not illustrated, isused to form the N-type body region 30 and the N-type deep well 20.Furthermore, according to such an example, an additional N-type driftdrain extension region 23 is formed in the N-type deep well 20 and theadditional N-type drift drain extension region 23 encloses the N+ drainregion 25 of a semiconductor device. Furthermore, in the example of FIG.1, a P-type buried layer 51 is formed in the N-type deep well 20 and theP-type buried layer 51 is in contact with the N-type drift drainextension region 23.

Additionally, a Local Oxidation of Silicon (LOCOS) isolation region 60is formed on the N-type deep well 20. Further, a gate insulation layer65 is formed over the N-type body region 30 and the N-type deep well 20.A gate electrode 70 is formed over the gate insulation layer 65.However, a total N-type dopant concentration of a semiconductor featureincreases when compared to a semiconductor device having a non-isolatedP-type body region 400, such as presented with reference to FIG. 2.Thereby, a pre-determined N to P dopant concentration balance ispotentially broken and the breakdown of such a balance potentiallycauses a problem of distorting and destabilizing pre-determined abreakdown voltage BV_(DSS) between a source-drain region.

Thus, when an additional well region is added to electronically isolatea region within a substrate, one device potentially has a higher N-typedoping concentration than another device. Consequently, such animbalance of predetermined N:P doping concentrations leads to problemswith the control of an optimum BV_(DSS) between source and drain regionsof a diode.

Therefore, in an effort to solve said problem of dopant imbalance, asemiconductor and method of fabricating such a semiconductor of thepresent examples, provides a semiconductor device which is able tomaintain a pre-determined high breakdown voltage by controlling totalimpurity concentration of N-type deep well 20. By controlling theimpurity concentration, the semiconductor device avoids the previouslydiscussed problems with respect to breakdown voltage.

FIG. 2 illustrates an example of a total semiconductor device appliedwith a semiconductor device according to an example.

Referring to the example of FIG. 2, a semiconductor device according toan example is applied on a P-type substrate 10 as one of a plurality ofsemiconductor devices. An LDMOS device, which is a lateralMetal-Oxide-Semiconductor Field Effect Transistor (MOSFET) device, isgiven as an example of a semiconductor device according to the presentexamples.

Referring to the example of FIG. 2, a plurality of semiconductor devicepotentially at least includes a first semiconductor device 1 and asecond semiconductor device 2. Moreover, the plurality of semiconductordevice optionally further includes several active or passive devicesspaced apart from a first and a second semiconductor device.

Referring to the example of FIG. 2, a first semiconductor device 1 is astructure with a quasi-isolated body region 40 and, a secondsemiconductor device 2 is a structure with a non-isolated body region400.

In the example of FIG. 2, two said semiconductor devices are formedsimultaneously when using a semiconductor and method of fabricating thesemiconductor according to the present examples.

In the example of FIG. 2, a first and a second semiconductor device 1, 2only differ in an existence and structure of a N-type body region withrespect to how the N-type body region is configured to surround a P-typebody region 40, 400 and the rest of the structure is identical. Forexample, a first semiconductor device 1 includes an N-type deep well 20on a P-type substrate 10; a gate insulation layer 65; a gate electrode70, an N+ drain region 25 on the N-type deep well 20, an N+ sourceregion 45 and a P+ pickup region 47, and a P-type body region 20. Withrespect to the first semiconductor device 1, a P-type body region 40 ofthe first semiconductor device 1 becomes a channel region of the LDMOSdevice. Said features identically apply to corresponding elements on asecond semiconductor device 2, but different drawing numerals are givento the respective elements of a second semiconductor device 2 for easierexplanation.

Moreover, a first semiconductor device 1 potentially further includes aN-type drift drain extension region 23 that is formed in a periphery ofthe N+ drain region 25. An impurity concentration of the N-type deepwell 20 and an impurity concentration of an N-type of the drift drainextension region 23 are potentially different. Additionally, impurityconcentration of the N-type drift drain extension region 23 and the N+drain region 25 are potentially different and for example, an impurityconcentration of the N-type drift drain extension region 23 is formed tobe lower than the impurity concentration of the N+ drain region 25.Likewise, a breakdown voltage of a semiconductor device is increased byforming an impurity concentration of the N-type drift drain extensionregion 23 to be lower than that of N+ drain region 25.

Furthermore, in the example of FIG. 2, it is possible for a P-typeburied layer 51 to be formed in the N-type deep well 20. The P-typeburied layer 51 potentially is in contact with the N-type drift drainextension region 23. In FIG. 2, P-type buried layer 51 is illustrated inthe example as being formed below a LOCOS isolation region 60. Forexample, the P-type buried layer 51 is formed in a certain spaceisolated from the LOCOS isolation region 60. In response, a structureand operation of a drain region 230 and a P-type buried layer 510, inregards to the second semiconductor device 2 with the non-isolatedP-type body region 400, are identical or similar to those of a case of afirst semiconductor device 1, and thus, the explanation is omitted forbrevity.

In the example of FIG. 2, a first semiconductor device 1 includes anN-type body region 30, such that the N-type body region 30 is in contactwith a part of one side of a N-type deep well 20. The N-type body region30 is configured so as to surround the P-type body region 40. Here, theN-type body region 30 electronically isolates the P-type body region 40and the source region 45 from the P-type substrate 10. Thus, by use ofsuch an approach, the source region 45 and the P-type substrate 10 areable to maintain a different potential in the first semiconductor device1.

On the other hand, a second semiconductor device 2 with a non-isolatedP-type body region has no such a N-type body region 20, as is present inthe first semiconductor device 1.

Likewise, both the first semiconductor device 1 and the secondsemiconductor device 2 are composed so as to have a very similarstructure, and so it is possible to simultaneously manufacture the twosemiconductor device through identical mask processes. Thereby,manufacturing costs are reduced by reducing the amount of mask processesthat are necessary.

For example, the N-type deep wells 20, 200 and N-type body region 30 forthe first semiconductor device 1 with a quasi-isolated P-type bodyregion 40 and the second semiconductor device 2 with a non-isolated bodyregion 400 are all potentially formed in one N-type deep well mask, asis illustrated with reference to FIG. 3 at 110. Thus, a bottom depth ofthe N-type deep wells 20, 200 and a bottom depth of the N-type bodyregion 30 are almost identical. These depths are the same because theN-type deep wells 20, 200 and the N-type body region 30 are formed byusing an identical N-type deep well mask 110.

However, a first semiconductor device 1 has a higher N-type dopantconcentration than a second semiconductor device 2, since the N-typebody region 30 is added, compared to a second semiconductor device 2. Inan example, it is assumed that N:P dopant concentration is fixed at 5:1in a second semiconductor device 2. If there is no reduction of a dopantconcentration in the N-type deep well 20, the N:P dopant concentrationratio potentially increases to 7:1 or 8:1 in a first semiconductordevice 1. In that case, the increase causes an imbalance in thepredetermined N:P dopant concentration ratio which was chosen to set anoptimum breakdown voltage BV_(DSS) between source and drain regions.

Thus, the dopant concentration of the N-type deep well 20 is controlledso as to maintain the predetermined N-type and P-type dopantconcentration in the active region, which helps to control and regulatethe breakdown voltage. Thus, a doping concentration of N-type dopant ofthe N-type deep well 20 of a first semiconductor device 1 is lowered,because the N-type body region 30 is added in a first semiconductordevice. Lowering the N-type dopant concentration in this mannercompensates for the added N-type dopant. Thus, based on such amodification, a first semiconductor device 1 and a second semiconductordevice 2 have almost the same N-type doping concentration as each other.A sum of N-type concentrations including concentrations for both theN-type deep well 20 and the N-type body region 30 in the firstsemiconductor device 1 becomes substantially equal to a sum of totalN-type concentration of the N-type deep well 200 in the secondsemiconductor device. Thus, the implanted areas of the N-type deep well200, the N-type body region 30 and the N-type deep well 20 arecontrolled to balance the total N-type dopant concentration betweenfirst semiconductor device 1 and second semiconductor device 2. Bycontrolling the dopant concentration, it follows that the breakdownvoltage is also controlled. For example, a dopant implanted area of theN-type deep well 200 in the second semiconductor device 2 matches withthe total implanted area of the N-type body region 30 and the N-typedeep well 20 in the first semiconductor device 1. Therefore the N-typedopant concentration balance between the first semiconductor device 1and the second semiconductor device 2 is obtained using such anapproach.

While additional masks are potentially used to form the N-type deep wellregion 20 of a first semiconductor device as one method to solve theabove problems. However, in this case, manufacturing costs increase dueto the need for an additional mask process.

Therefore, the examples provide a method of balancing N-type dopantconcentration between first semiconductor device 1 and secondsemiconductor device 2. Furthermore, the examples provide a method ofsimultaneously forming N-type deep well region 20 and N-type deep wellregion 200, subject to the need to balance N-type dopant concentration.A mask pattern with a stripe pattern is used to form the first N-typedeep well 20 and the second N-type deep well 200 and the N-type bodyregion 30. Likewise, using a mask pattern that includes a plurality ofblocking patterns of stripe pattern potentially better controls abalance with respect to N-type dopant concentration between the firstsemiconductor device 1 and the second semiconductor device 2. To thisend, an amount of N-type dopants injected into N-type deep well 20during manufacturing is controllable. Thus, a ratio of N-type dopantconcentration compared to P-type dopant concentration in thesemiconductor region is almost the same between the first semiconductordevice 1 and the second semiconductor device 2. Hence, the semiconductorregion designates the active region including N-type deep well 200,N-type deep well 20, N-type body region 30. Therefore, using such atechnique, a high BV_(DSS) is obtained due to a preserved N:P dopantsratio. For example, a dopant implanted area of N-type deep well 200 hasthe same dopant implantation area with respect to N-type deep well 20.In addition, implanted depth of N-type deep well 200 has the sameimplanted depth with respect to N-type deep well 20.

Thus, an N-type charge quantity for a N-type deep well region 20corresponding to a surrounding drain region is reduced as much as anN-type charge quantity is increased due to added N-type body region 30in a first semiconductor device 1. Accordingly, a ratio of N-typerelative to P-type charge quantity is stably maintained as a whole.Thereby, an improvement in breakdown voltage and stably securingbreakdown voltage is achieved.

Furthermore, a breakdown voltage value is also increased in areverse-biased state between an N-type drain region 25 and an N-typesource region 45. Thus, a first semiconductor device 1 according to anexample, a doping concentration per unit area of N-type deep well 20 isformed to be lower than a doping concentration per unit area of N-typebody region 30. This lower doping concentration is achieved because amask pattern with a plurality of blocking pattern formed with a stripepattern is used in the formation of a N-type deep well region 20 in themanufacturing process of a semiconductor device.

Moreover, as shown in FIG. 2, a bottom of the N-type deep well 20 issomewhat curved or is formed in a valley shape. Thus, a bottom of theN-type deep well 20 is not formed to have a flat shape but instead isformed at constant spacing in a curved shape. Regional limits of ioninjection exist in a mask pattern and are applied on N-type deep well20. Thereby, a bottom of the N-type deep well 20 is formed at a spacingwith a plurality of wells and one groove is formed on the bottom or canbe formed in a wave shape with a plurality of grooves B. Additionalillustration regarding this subject matter is recited in detail throughreference to FIG. 3.

FIG. 3 is a diagram, illustrating a semiconductor and method ofmanufacturing the same according to an example and FIG. 4 is a diagram,illustrating a semiconductor device that is manufactured according to anexample, and FIG. 5 illustrates concentration profile A-A′ in thesemiconductor device of such an example.

Herein, FIG. 3 illustrates an example of N-type deep well 20, 200 andN-type body region 30 of a semiconductor device according to the presentinvention formed through mask process. For better understanding, a maskpattern 110 that is applied for a first semiconductor device isillustrated first in FIG. 3.

In the example of FIG. 3, the N-type deep well 20 and the N-type bodyregion 30 are formed together through a mask process that uses a deepwell mask pattern 110 on a P-type substrate 10 as illustrated in FIG. 3at (A) and (B). The deep well mask pattern 110 indicates positions ofPhoto Resist (PR). In such an example, the mask pattern 110 includes afirst stripe pattern 111 and a second stripe pattern 112, such that thefirst stripe pattern 111 is located so as to differentiate the N-typedeep well region 20 from the N-type body region 30.

In the example of FIG. 3, a first stripe pattern 111 is formed with agreater width than the second stripe pattern 112. A first stripe pattern111 is a pattern that divides the N-type body region 30 and the N-typedeep well region 20. As illustrated in FIG. 3 at (B), a first stripepattern 111 is divided in to two regions at point “A”. A boundarybetween a first deep well 20 and the N-type body region 30 becomesambiguous if a first stripe pattern is not used. By contrast, if a firststripe pattern 111 is used, as shown in the example of FIG. 3, adivision is clear and a deep groove in a concave shape is formed atpoint “A”. When such a shape is formed, it helps to form a pinch-offregion that acts as a junction gate field-effect transistor (JFET)device. An N-type drift region exists on the upper deep well region 20that is the accumulation region. The P-type substrate 10 protrudes intothe space between the N-type body region 30 and the N-type deep well 20,which results in forming an N-channel JFET region. Therefore, the N-typebody region 30 is protected from a situation where the N+ drain region25 has a high voltage when semiconductor device is activated. Thisprotection occurs because as shown in the example of FIG. 3, a pinch-offregion exists at point “A” that is configured to decrease electricfield. Accordingly, to achieve this effect, the first strip pattern 111in the first example is formed with approximately 2-7 μm length of widthin an 400-800V semiconductor device.

By contrast, a plurality of second stripe patterns 12 can be formed witha smaller width than a first stripe pattern 111, and are thus formedwith approximately 1-3 μm of width. In other words, the second stripepattern 112 is used with a line/space type stripe pattern of a narrowand long stick shape or dot-matrix type pattern. Thus, the second stripepattern 112 plays a role of blocking ion implantation. The deep wellmask pattern 110 is differentiated by a “C” region that is configured soas to form the N-type deep well region 20 and a “D” region that isconfigured so as to form the N-type body region 30. In an example, atleast one more second stripe patterns 112 is formed in the “C” region.The example of FIG. 3 illustrates a second stripe pattern 12 formed intwo or three portions as an example, but the examples are not limited tothis particular example and alternatives are possible. For example, theN-type deep well 20 and the N-type body region 30 care simultaneouslyformed by simultaneously ion injecting phosphorus (P), arsenic (As),and/or antimony (Sb) as dopants. Then, when thermal treatment fordiffusion of the ion injected N-type impurities 1 is performed, theN-type deep well 20 is formed in the “C” region and the N-type bodyregion 30 is formed in the “D” region. Due to diffusion of dopants, eachdiffused region is merged into one region as shown in FIG. 3 at (B).

Likewise, as a stripe pattern is added into a mask pattern 110, thestripe pattern is configured using a PR form. Thus, the region beneaththe PR is prevented from ion injection by the PR during ion injection.Thus, the stripe pattern as discussed becomes a blocking pattern thatprevents a kind of ion injection. Accordingly, ion injection is notconducted in regions shielded by PR in the case of an ion injectionprocess. Thus, an ion injected N-type impurity 3 is respectively formedin isolation as illustrated in FIG. 3 at (A).

However, a respective N-type impurity 3 is diffused and comprises onedeep well region 20 as shown FIG. 3 at (B) through a thermal orannealing treatment. In this process, the N-type impurity 3 is diffusedin both directions with regions not ion injected of the N-type impurity3. The amount of impurity amount diffused herein, differs according toannealing temperature and time that are used in follow-up thermaltreatment process. Ultimately, a concentration of N-type ion,corresponding to charge quantity, per unit area of N-type deep wellregion 20 is smaller than that of deep well region 200 in the secondsemiconductor device 2. This relationship holds because the stripepattern is not used for forming the deep well region 200 in the secondsemiconductor device 2. Thus, total N-type charge quantity is controlledby using the plurality of stripe pattern 112. Likewise, if a blockingpattern like stripe pattern 112 is added on a “D” region, a total N-typecharge quantity or dopant concentration in the N-type deep well 20 isreduced. In the present example, however, there is no use of the stripepattern in the “D” region.

By using a mask pattern 110 with at least two regions of a second stripepattern 112 formed on a “C” region for configuration of the N-type deepwell 20, ion injection is limited in some region of substrate 10 due tothe regions of the second stripe pattern 112. After going through adiffusion process, ion injected impurities are diffused together.Thereby, a single contiguous deep well region 20 is formed and itsbottom surface has a wave shape with one or a plurality of grooves “B”.In other words, unlike an ion injection process without using stripepatterns as illustrated in the example of FIG. 1, a bottom of N-typedeep well 20 has an uneven surface, designated as “B”, according to theexample. On the contrary, a deep well region 20 formed by an ioninjection process that uses a wide opening has a very flat profile, witha coplanar shape on the bottom as shown in the example of FIG. 1.

In the example of FIG. 3, a deep well mask pattern 110 relating to thesecond semiconductor device is not illustrated in the drawing but ispresent in certain examples as discussed further, below. The deep wellmask pattern 110 which is illustrated in FIG. 3 at (A) is formed with anidentical extension to the second semiconductor device 2. Additionally,the stripe pattern 112 that is used in “C” region of the firstsemiconductor device 1 is not formed in deep well region 200 of thesecond semiconductor device 2. Furthermore, the N-type body region 30 isnot formed in the second semiconductor device 2, unlike as in the firstsemiconductor device 1.

FIG. 4 is a diagram illustrating a semiconductor device that ismanufactured according to an example and a diagram to link with a dopingprofile of a final semiconductor device according to an example using PRstripe mask pattern 112. As illustrated in the example of FIG. 4, thebottom of the N-type deep well has an uneven surface and its valley,designated “B”, is aligned with the position of a stripe pattern 112.This is because ion injection of impurity dopant is limited in a regionbeneath the pattern 112 due to the presence of the stripe pattern 112so, unlike other N-type deep well 20, bottom of N-type deep well 20 isrecessed a little.

FIG. 5 is a diagram comparing the N-type body region 30 in regards to aZ-Z′ line at FIG. 5 at (A) and a concentration profile at FIG. 5 at (B)in regards to the N-type deep well region 20 of a semiconductor deviceaccording to the example. As illustrated in FIG. 5 at (B), the N-typebody region 30 shows a substantially flat doping profile in a horizontaldirection. By contrast, N-type deep well region 20 does not have aconstant impurity doping concentration in the horizontal direction,unlike the N-type body region 30, and shows a doping profile of a waveshape that fluctuates within certain sections. This profile occursbecause ion injection in certain region of a substrate 10 is interferedwith by the stripe pattern 112 as previously mentioned.

Furthermore, a total average concentration that dominates per unit areaof the N-type deep well 20 also seems to be lower than the N-type bodyregion 30. This is because, as discussed, certain portions of substrate10 are not ion injected due to the stripe pattern 112.

A mask pattern for the configuration of the N-type deep well 20 isillustrated in FIG. 6A to FIG. 6E. According to various examples, themask patterns illustrated in FIG. 6A to 6E are applied with a maskpattern of the N-type deep well region “C” among mask patterns that areconfigured to simultaneously form the N-type deep well 20 and the N-typebody region 30.

FIGS. 6A to 6E are diagrams which illustrate mask patterns which areused in formation of the deep well according to the examples. For easierillustration, the drawing code 120 is used to refer to the entire maskpattern but is also potentially applied on one region of the maskpattern 110 of FIGS. 2 to 4. For an easier understanding of a positionof mask pattern arrangement, certain regions of a semiconductorstructure, illustrated in FIGS. 2 to 4 are added in a horizontaldirection with respect to the substrate surface.

Referring to a top view, in an example, a second stripe pattern 112 isformed in the form of lines, formed evenly spaced apart on a maskpattern 120. In other words, a second stripe pattern 112 is potentiallyformed in a rectangular form of strips of narrow width, from theperspective of a top view, that are formed to be evenly spaced apart.Thus, in FIGS. 6A to 6E, drawing area 45 indicates source region,drawing area 70 indicates gate electrode and drawing area 25 indicatesdrain region. Moreover, width X in regards to stripe pattern indicates aminimum distance between a stripe pattern and the next stripe patternand width Y indicates a width of one stripe pattern. In the examples,width X is to be chosen to be identical or larger than width Y. Forexample, when width X is 5-15 μm, width Y is 0.5-3 μm, since only whenwidth X is formed larger than width Y, it is possible for the N-typedeep well 20 of over a certain size to be formed to have certainproperties. Herein, stripe pattern 112 is seen as a mask patternconfigured of PR, as discussed above. Said narrow and long stick shapedstripe patterns operate as blocking areas in the ion-injection processdiscussed above. Also, a concentration of the N-type deep well 20decreases as width Y becomes larger. Accordingly, by controlling widthY, concentration of dopants in the N-type deep well 20 is controllable.However, if the width Y is configured too large, the diffusion distancebecomes limited when ion-injected dopants diffuse, so the diffusiondistance is intended to be taken into consideration upon design. In acase of a stripe pattern in which larger width than diffusion distanceis formed, an additional deep well 20 such that the deep wells 20 areformed isolated from each other is optionally formed.

Furthermore, referring to the example of FIG. 6B, in a top view, thesecond stripe pattern 112 is formed having a shape of a plurality ofdifferentiated lines that are linear stripes in a vertical direction.

Moreover, as illustrated in FIG. 6C, a second stripe pattern 112 isformed as lines of different patterns, unlike FIG. 6B. In this case,unlike FIG. 6B, with regards to mask pattern 120, a second stripepattern 112 of three stripes is formed on a first cross section (E-E′)while, a second stripe pattern 112 of two stripes is formed on a secondcross section (F-F′).

Moreover, as illustrated in FIG. 6D, at a top view, the second stripepattern 112 is formed as a plurality of line shapes that are isolatedfrom one another in a horizontal direction with respect to the substratesurface. In this case, only one stripe of a second stripe pattern 112with a wide width is formed along a third cross section (G-G′) withregards to the mask pattern 120.

Moreover, as illustrated in FIG. 6E, in a top view, the second stripepattern 112 can be formed in a circular shape instead of the narrow andlong PR stripe pattern. Such a circular pattern 112 is potentiallyapplied with different sizes, separation distances, and number ofsemiconductor devices applied to designs of examples.

Additionally, various examples are applied as using other ion-injectedblocking PR mask patterns 112 that are applied to implement theprinciples of examples as discussed above.

Likewise, one reason why a second stripe pattern 120 is formed on a maskpattern that is applied on the N-type deep well region “C” for theN-type deep well 20 configuration as discussed, is to reduce chargequantity so as to correspond with an increased charge quantity due to acorresponding configuration of an N-type body region 30. As a whole, anP-N charge quantity is stably maintained thereby, and hence animprovement in breakdown voltage and securing a more stable breakdownvoltage becomes possible.

FIG. 7 illustrates a semiconductor substrate according to anotherexample.

In comparison with the example of FIG. 3, a semiconductor structure thatis illustrated in the example of FIG. 7 has no N-type body region thatsurrounds the N-type source region 45 and the P-type body region 40. Inother words, it shows the use of a non-isolated nLDMOS structure.Accordingly, semiconductor structure illustrated in FIG. 7 is an exampleof forming N-type deep well 20 in a non-isolated nLDMOS structure thatuses mask patterns 110, 120 with stripe structure formed as illustratedin the examples of FIG. 6 and related techniques. Likewise, the examplesapply not only to Quasi-isolated LDMOS but also to non-isolated LDMOSdevices.

If a mask process is conducted with a mask pattern 120 that is formed ofstripes as is illustrated in FIG. 6, a part of a region among bottom ofthe N-type deep well 20 is formed in a recessed structure, and as aresult has an effect of causing an increase in breakdown voltage value.This is because a depletion region is formed more easily in a ReverseBias state, corresponding to such an example.

FIG. 8 illustrates a semiconductor device according to another example.

Herein, a semiconductor structure, illustrated in FIG. 8, ismanufactured with the N-type body region 30 and the N-type deep wellregion 20 that are the results of different masks, unlike the example ofFIG. 3. Accordingly, the example of FIG. 8 is an example in which thedepths of N-type body region 30 and N-type deep well 20 is formed asbeing different from each other.

As illustrated in FIG. 8, an impurity is ion-injected using mask patternthat is formed having stripes so as to form the N-type deep well 20, andthereby, the N-type deep well 20 has an uneven surface at the bottom.

In a case of the example illustrated in FIG. 8, the example has an issueof an increase in manufacturing cost because at least one more maskprocess is used compared to the example of FIG. 2. However, in theexample illustrated in FIG. 8, achieving an impurity concentration asprovided for in examples is potentially achieved by forming the N-typebody region 30 and the N-type deep well 20 through using different maskprocess. Thereby, as illustrated in FIG. 8, the N-type body region 30and the N-type deep well 20 are formed with different depths.

Additional features of a semiconductor device according to the presentexamples are recited further compared with alternatives through FIG. 9Ato FIG. 11.

FIG. 9A to FIG. 9B are diagrams illustrating results of features in asemiconductor device as illustrated in the example of FIG. 1 and asemiconductor device of FIG. 5 according to the present examples.

First, in the example of FIG. 9A, a mask pattern with a stripe structureformed in a mask region so as to form the N-type deep well 20 thereof isused in order to form a semiconductor device according to the examples.FIG. 9A also illustrates a graph that shows a drain current or ID valueaccording to BV_(DSS) value with respect to a N-type deep well structurethat is formed according to the mask pattern. Regardless of the positionof a wafer, distribution of breakdown voltage (BV) value is concentratedat around 800V. LBCTR indicates how left, bottom, center, top, right(LBCTR) positions in one wafer and a representative position in a waferperform. By comparing BV value according to positions, FIG. 9A shows howBV values are similar in various portions of a wafer.

By contrast, in FIG. 9B, a mask pattern with no stripe structure isformed in a mask region so as to form a N-type deep well and therebyproduce a semiconductor structure as illustrated in FIG. 1. Moreover,FIG. 9B illustrates a graph which indicates drain current or ID valueaccording to BV_(DSS) value, voltage between source-drain regions, inregards to a N-type deep well structure that is formed according to themask pattern.

Referring to FIG. 9B, in the present invention, the distribution of BVvalue is widely variant from 500 to 700 V. This distribution is causedby unbalanced charge quantity between N-type and P-type.

FIG. 10 is a diagram illustrating breakdown voltage values of asemiconductor structure according to an example and a semiconductorstructure according to another example.

As illustrated in FIG. 10, the breakdown voltage value of asemiconductor structure that is manufactured according to asemiconductor manufacture method of the present examples occurs between700-900 V. Contrariwise, semiconductor structure according to thealternative example of FIG. 1 has a breakdown voltage value under 700 V.

As suggested in the examples, in the case of a semiconductor structurethat uses a mask pattern with stripe structure configured so as to formthe N-type deep well 20, a breakdown voltage value between 700-900 V isformed. By contrast, in alternatives, a breakdown voltage value under700 V is formed. When the N-type deep well is formed using a stripepattern, a charge quantity per unit area of N-type deep well 20 smallerthan N-type body region 30, high BV value is obtained. In an identicalcondition, a BV_(DSS) value is produced as being improved in comparisonby up to more than 200 V, according to existence of a stripe pattern inthe N-type deep well.

FIG. 11 illustrates N-type doping concentration profile in the deep wellregion with or without a stripe pattern. A-A′ illustrates a dopingprofile when the strip pattern is used in the deep well region 20. A-A′shows a non-planar shape in a horizontal direction. On the other hand,B-B′ illustrates doping profile when the strip pattern is not used inthe deep well region 20. B-B′ shows a planar shape in a horizontaldirection.

In a case of a stripe pattern used herein, doping concentration iscaused to have a value around 3±0.5E16 atoms/cm³. Contrariwise, B-B′ hasalmost no concentration difference in a horizontal direction. In a caseof a stripe pattern used herein, an average concentration is 3E16atoms/cm³. However, in a case in which a stripe pattern is not used, anaverage concentration of B-B′ line is 3.6E16 atoms/cm³. Difference indoping concentration is within one order of magnitude range. Such adifference implies that doping concentration of N-type deep well 20 of afirst semiconductor device 1 does not differ over 1 order of magnitudewith doping concentration of N-type deep well region 200 of a secondsemiconductor device 2. This property also means that a dopingconcentration of N-type deep well 20 of a first semiconductor devicedoes not differ over one order of magnitude from the dopingconcentration of N-type body region 30. However, if width Y of a secondstrip pattern is lengthened, doping concentration possibly differs over1 order of magnitude.

When a stripe pattern is not used, such as in the semiconductorstructure of the example of FIG. 1, a silicon substrate surface has avery high impact ionization rate in a periphery of a source region. As aresult, relatively more Electron-Hole Pairs (EHP) are generated byimpact ionization on substrate surface. Thus, low voltage breakdowneasily occur in a periphery of source region. Hence, BV_(DSS) isdegraded.

Thus, it is favorable that doping concentration of the N-type deep well20 adjacent to the drain region 25 is lower than that of the N-type bodyregion 30 adjacent to source region 45 using stripe pattern in a firstsemiconductor device. Moreover, a concentration of the N-type deep wellregion of a first semiconductor device with isolated body region islower than the N-type deep well region of a second semiconductor devicewith a non-isolated body region. Thereby, the total N-type dopingconcentration of a first semiconductor device is almost the same astotal N-type doping concentration of a second semiconductor device whichdoes not use a N-type body region. As previously discussed, a stripepattern blocks ion implantation for the N-type deep well region 20, andthereby it reduces doping concentration in the N-type deep well region20.

Consequently, a first semiconductor device 1 and a second semiconductordevice 2 almost have the same N-type doping concentration. For example,the sum of doping concentrations of the N-type deep well 20 and theN-type body region 30 in the first semiconductor 1 is balanced with thetotal N-type concentration of N-type deep well 200 in the secondsemiconductor device 2. Although area of N-type deep well 200 in thesecond semiconductor has almost the same area with the N-type deep well20 in the first semiconductor device, the increased N-type dopantconcentration caused by the addition of the N-type body region into thefirst semiconductor device is compensated for by reducing the dopingconcentration of the N-type deep well region 20 caused by blockingpattern such as the stripe pattern applied, as discussed.

A semiconductor device and method of fabricating the same according tothe examples, by using a mask process with a plurality of ion injectedblocking structures formed so as to form a second conductive type deepwell region on a first conductive type substrate, decreases totalconcentration of impurity and simultaneously forms a concentration ofimpurity in horizontal direction with respect to substrate surface.Therefore, such an approach has an effect of securing a more stable highbreakdown voltage.

While this disclosure includes specific examples, it will be apparent toone of ordinary skill in the art that various changes in form anddetails may be made in these examples without departing from the spiritand scope of the claims and their equivalents. The examples describedherein are to be considered in a descriptive sense only, and not forpurposes of limitation. Descriptions of features or aspects in eachexample are to be considered as being applicable to similar features oraspects in other examples. Suitable results may be achieved if thedescribed techniques are performed in a different order, and/or ifcomponents in a described system, architecture, device, or circuit arecombined in a different manner, and/or replaced or supplemented by othercomponents or their equivalents. Therefore, the scope of the disclosureis defined not by the detailed description, but by the claims and theirequivalents, and all variations within the scope of the claims and theirequivalents are to be construed as being included in the disclosure.

What is claimed is:
 1. A semiconductor device comprising: a first regionand a second region located on a substrate; a first semiconductor devicelocated in the first region and having a first deep well region with afirst doping concentration; a second semiconductor device located in thesecond region and having a second deep well region with a second dopingconcentration that is greater than the first doping concentration; afirst body region of a first conductivity type having a third dopingconcentration, adjacent to the first deep well region, wherein the firstdoping concentration is less than the third doping concentration; and asecond body region of a second conductivity type opposite to the firstconductivity type located in the first body region, wherein the firstdeep well region has a non-planar doping profile in a horizontaldirection.
 2. The semiconductor device of claim 1, wherein the firstdeep well region has an uneven bottom surface.
 3. The semiconductordevice of claim 1, wherein a total doping concentration of the firstdeep well region and the first body region is substantially balancedwith a total doping concentration of the second deep well region.
 4. Thesemiconductor device of claim 1, wherein the first doping concentrationis less than the second doping concentration by within one order ofmagnitude.
 5. The semiconductor device of claim 1, further comprising: apinch-off region in the semiconductor substrate located between thefirst deep well region and the first body region.
 6. The semiconductordevice of claim 1, wherein the first deep well region has substantiallythe same depth as the first body region.
 7. The semiconductor device ofclaim 1, wherein the first deep well region has a bottom surface thathas a wave-shaped pattern.
 8. The semiconductor device of claim 1,wherein the first deep well region has the same conductivity type as thefirst body region.
 9. A semiconductor device comprising: a first deepwell region with a first doping concentration of a first semiconductordevice located in a first region located on a substrate; a second deepwell region with a second doping concentration that is greater than thefirst doping concentration of a second semiconductor device located in asecond region located on a substrate; a first body region of a firstconductivity type with a third doping concentration adjacent to thefirst deep well region, wherein the first doping concentration is lessthan the third doping concentration; and a second body region of asecond conductivity type opposite to the first conductivity type locatedin the first body region, wherein the first deep well region has anon-planar doping profile in a horizontal direction.
 10. Thesemiconductor device of claim 9, wherein the first deep well region hasan uneven bottom surface.
 11. The semiconductor device of claim 9,wherein a total doping concentration of the first deep well region andthe first body region is substantially balanced with a total dopingconcentration of the second deep well region.
 12. The semiconductordevice of claim 9, wherein the first doping concentration is less thanthe second doping concentration by within one order of magnitude. 13.The semiconductor device of claim 9, further comprising: a pinch-offregion in the semiconductor substrate located between the first deepwell region and the first body region.
 14. The semiconductor device ofclaim 9, wherein the first deep well region has substantially the samedepth as the first body region.
 15. The semiconductor device of claim 9,wherein the first deep well region has a bottom surface that has awave-shaped pattern.
 16. The semiconductor device of claim 9, whereinthe first deep well region has the same conductivity type as the firstbody region.